Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Kendall, J. M. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Lee, M. C. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Wang, T. G. (California Institute of Technology, Jet Propulsion Laboratory, Pasadena CA, United States) Date Acquired
August 10, 2013
Publication Date
April 1, 1982
Publication Information
Publication: Journal of Vacuum Science and Technology
Volume: 20
Accession Number
82A45842
Distribution Limits
Public