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Pressure pulsations above turbomolecular pumpsLange and Singleton (1978) have observed pressure pulses above a turbomolecular pump. They reported that the mean pulse frequency increased with the temperature of the pump cooling water and that the evolved gas was mainly hydrogen. The present investigation takes into account tests conducted with a similar pumping system. The pumping system was equipped with additional pressure-monitoring equipment in order to study these pulsations in more detail. It was found that at least two distinct types of pressure pulsations may be present in a turbomolecular-pumped ultrahigh vacuum system. The random hydrogen pulses are easily eliminated for period of days by changing the cooling water temperature. The cyclic pulses consisting mainly of water vapor are not likely to be a problem in normal experiments.
Document ID
19820062895
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Danziger, S.
(Pennsylvania State Univ. University Park, PA, United States)
Kendall, B. R. F.
(Pennsylvania State Univ. University Park, PA, United States)
Dormer, J.
(Pennsylvania State University University Park, PA, United States)
Date Acquired
August 10, 2013
Publication Date
October 1, 1982
Publication Information
Publication: Journal of Vacuum Science and Technology
Volume: 21
Subject Category
Engineering (General)
Accession Number
82A46430
Funding Number(s)
CONTRACT_GRANT: NSG-3301
Distribution Limits
Public
Copyright
Other

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