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Gas-Jet Meniscus Control in Ribbon GrowthGas jet used to control shape of meniscus and thus to regulate ribbon thickness in vertical silicon-ribbon growth. Gas jet also cools ribbon, increasing maximum possible pull speed for silicon, contact angle of 11 degrees plus or minus 1 degree required for constant thickness ribbon growth. Cooling effect of gas jet increases maximum possible pull speed.
Document ID
19830000112
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Zoutendyk, J. A. (CALTECH)
Vonroos, O. (CALTECH)
Date Acquired
August 11, 2013
Publication Date
August 1, 1983
Publication Information
Publication: NASA Tech Briefs
Volume: 7
Issue: 3
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
NPO-14978
Accession Number
83B10112
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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