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Improved Electrostatic Optical SystemDevice suitable for molecular epitaxial formation of semiconductor components. Improved electrostatic lens system uses cylindrical mirror as central element between two tubular lenses. Abberations introduced by mirror tend to cancel those introduced by tubular lenses. Result is order-of-magnitude improvement in chromatic or spherical compensation.
Document ID
19830000302
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Lewis, B. F. (CALTECH)
Date Acquired
August 11, 2013
Publication Date
April 1, 1984
Publication Information
Publication: NASA Tech Briefs
Volume: 8
Issue: 1
ISSN: 0145-319X
Subject Category
Physical Sciences
Report/Patent Number
NPO-15774
Accession Number
83B10302
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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