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Low-Contamination Vibrating Feeder for Silicon ChipsVibratory feeding is method of controlling flow of small oddly shaped particles. Technique applied to other materials that require contamination control by feeding material through vibrating troughs topped by particular material.
Document ID
19830000445
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Mackintosh, B. H. (Mobil Tyco Solar Energy Corp.)
Date Acquired
August 11, 2013
Publication Date
April 1, 1984
Publication Information
Publication: NASA Tech Briefs
Volume: 8
Issue: 1
ISSN: 0145-319X
Subject Category
Machinery
Report/Patent Number
NPO-15128
Accession Number
83B10445
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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