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Oscillating-Crucible Technique for Silicon GrowthTechnique yields better mixing of impurities and superior qualiity crystals. Accellerated motion stirs melt which reduces temperature gradients and decreases boundary layer for diffusion of impurities near growing surface. Results better mixing of impurities into melt, decrease in tendency for dendritic growth or cellular growth and crystals with low dislocation density. Applied with success to solution growth and Czochralski growth, resulting in large crystals of superior quality.
Document ID
19830000455
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Daud, T.
(Caltech)
Dumas, K. A.
(Caltech)
Kim, K. M.
(IBM Corp)
Schwuttke, G. H.
(IBM Corp)
Smetana, P.
(IBM Corp.)
Date Acquired
August 11, 2013
Publication Date
April 1, 1984
Publication Information
Publication: NASA Tech Briefs
Volume: 8
Issue: 1
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
NPO-15938
Accession Number
83B10455
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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