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IC Fabrication Methods Improve Laser DiodesFamily of high-performance, tunable diode lasers developed for use as local oscillators in passive laser heterodyne spectrometer. Diodes fabricated using standard IC processes include photolithography, selective etching and vacuum deposition of metals and insulators. Packaging refinements improved thermal-cycling characteristics of diodes and increased room-temperature shelf life.
Document ID
19830000692
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Miller, M.
(Perkin-Elmer Corp.)
Pickhardt, V.
(Perkin-Elmer Corp.)
Date Acquired
August 11, 2013
Publication Date
November 1, 1984
Publication Information
Publication: NASA Tech Briefs
Volume: 8
Issue: 2
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
LAR-13059
Accession Number
83B10692
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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