Evaluation of a virtual phase charged-coupled device as an imaging X-ray spectrometer

The X-ray response of an 800 x 800 Texas Instruments virtual phase charge-coupled device (CCD) has been measured in the range 1-8 keV. In the single-photon counting mode, excellent energy resolution (approximately 250 eV FWHM is found for single-pixel Fe-55 X-ray events at a spatial resolution of 15 microns. The detector quantum efficiency for all events is 65% at 2.3 keV (S K line) and approximately 34% at 5.9 keV (Mn K line from Fe-55). The CCD response is linear in energy to a few percent over the 1-8 keV energy range. These results demonstrate that virtual phase CCDs are superior imaging X-ray spectrometers with applications for X-ray astronomy and laboratory plasma research.