Development of a tantalum pentoxide Luneberg lens

A process has been developed for the fabrication of a tantalum pentoxide waveguide Luneburg lens as the input collimator for an optical signal processing circuit on a silicon substrate, such as an integrated wavelength demultiplexer. The development of such a lens involved improvement of the deposition mask profile, reduction of surface scattering by underlaying the lens, reduction of edge scattering by using shims under the mask, and prediction and measurement of the TE-TM polarization aberration. It is shown that polarization aberration significantly affects the design of a demultiplexer system.