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Stress measurement in thin films by geometrical opticsA variation of Newton's rings experiment is proposed for measuring film stress. The procedure described, the geometrical optics method, is used to measure radii of curvature for a series of film depositions with Ta, Al, and Mo films. The method has a sensitivity of 1 x 10 to the 9th dyn/sq cm, corresponding to the practical radius limit of about 50 m, and a repeatability usually within five percent. For the purposes of comparison, radii are also measured by Newton's rings method and the Talysurf method; all results are found to be in general agreement. Measurement times are also compared: the geometrical optics method requires only 1/2-1 minute. It is concluded that the geometrical optics method provides an inexpensive, fast, and a reasonably correct technique with which to measure stresses in film.
Document ID
19840046010
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Rossnagel, S. M.
(Colorado State Univ. Fort Collins, CO, United States)
Gilstrap, P.
(Colorado State Univ. Fort Collins, CO, United States)
Rujkorakarn, R.
(Colorado State University Fort Collins, CO, United States)
Date Acquired
August 12, 2013
Publication Date
December 1, 1982
Publication Information
Publication: Journal of Vacuum Science and Technology
Volume: 21
ISSN: 0022-5355
Subject Category
Instrumentation And Photography
Accession Number
84A28797
Funding Number(s)
CONTRACT_GRANT: NAG3-209
CONTRACT_GRANT: F29601-82-K-0009
Distribution Limits
Public
Copyright
Other

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