Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Tu, D.-W. (Princeton Univ. NJ, United States) Kahn, A. (Princeton University Princeton, NJ, United States) Date Acquired
August 12, 2013
Publication Date
June 1, 1984
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 2
ISSN: 0734-2101
Accession Number
84A37574
Funding Number(s)
CONTRACT_GRANT: JPL-956338
Distribution Limits
Public