Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Duke, C. B. (Princeton Univ. NJ, United States) Paton, A. (Xerox Corp., Webster Research Center Webster, NY, United States) Kahn, A. (Princeton Univ. NJ, United States) Tu, D.-W. (Princeton University Princeton, NJ, United States) Date Acquired
August 12, 2013
Publication Date
September 1, 1984
Publication Information
Publication: Journal of Vacuum Science and Technology B
Volume: 2
ISSN: 0734-211X
Accession Number
84A46099
Funding Number(s)
CONTRACT_GRANT: JPL-956338
Distribution Limits
Public