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Inexpensive Masks for Film DepositionSputtered sprayed lines less than 2 millimeters wide made by superimposing masks with partially overlapping openings. Slits first cut in masks by stamping or other economical process. Masks superimposed so slits define new openings narrower than original slits.
Document ID
19850000557
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Conley, W. R. (Illinois Tool Works, Inc.)
Date Acquired
August 12, 2013
Publication Date
March 1, 1986
Publication Information
Publication: NASA Tech Briefs
Volume: 9
Issue: 4
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
NPO-16416
Accession Number
85B10557
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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