Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Lien, C.-D. (California Inst. of Tech. Pasadena, CA, United States) Nicolet, M.-A. (California Institute of Technology Pasadena, CA, United States) Date Acquired
August 12, 2013
Publication Date
December 1, 1984
Publication Information
Publication: Journal of Vacuum Science and Technology B
Volume: 2
ISSN: 0734-211X
Subject Category
Chemistry And Materials (General) Accession Number
85A17091
Distribution Limits
Public