Fluidized bed silicon depositionThe growth of silicon on seed particles from the pyrolysis of silane in a fluidized bed reactor (FBR) was studied. The grown particles were shown to be crystalline and to have a structure which has been interpreted to indicate growth by chemical vapor deposition as well as by the collection (scavenging) of silicon clusters on seed particle surfaces. Scanning electron microscopy was used to study the product morphology.
Document ID
19850053502
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Hsu, G. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Morrison, A. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Rohatgi, N. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Lutwack, R. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Macconnell, T. (California Institute of Technology, Jet Propulsion Laboratory, Pasadena CA, United States)