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Smoother Scribing of Silicon WafersProposed new tool used to scribe silicon wafers into chips more smoothly than before. New scriber produces surface that appears ductile. Scribed groove cuts have relatively smooth walls. Scriber consists of diamond pyramid point on rigid shaft. Ethanol flows through shaft and around point, like ink in ballpoint pen. Ethanol has significantly different effect for scribing silicon than water, used in conventional diamond scribers.
Document ID
19860000473
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Danyluk, S.
(University of Illinois for Caltech)
Date Acquired
August 12, 2013
Publication Date
September 1, 1986
Publication Information
Publication: NASA Tech Briefs
Volume: 10
Issue: 5
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
NPO-16568
Accession Number
86B10473
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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