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Addressable inverter matrix for process and device characterizationThe addressable inverter matrix consists of 222 inverters each accessible with the aid of a shift register. The structure has proven useful in characterizing the variability of inverter transfer curves and in diagnosing processing faults. For good 3-micron CMOS bulk inverters investigated, the percent standard deviation of the inverter threshold voltage was less than one percent and the inverter gain (the slope of the inverter transfer curve at the inverter threshold vltage) was less than 3 percent. The average noise margin for the inverters was near 2 volts for a power supply voltage of 5 volts. The specific faults studied included undersize pull-down transistor widths and various open contacts in the matrix.
Document ID
19860019787
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Buehler, M. G.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Sayah, H. R.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Date Acquired
August 12, 2013
Publication Date
June 1, 1985
Publication Information
Publication: Product Assurance Technology for Custom LSI(VLSI Electronics
Subject Category
Electronics And Electrical Engineering
Accession Number
86N29259
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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