Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Hochman, R. F. (Georgia Inst. of Tech. Atlanta, GA, United States) Erdemir, A. (Georgia Institute of Technology Atlanta, United States) Dolan, F. J. (Georgia Inst. of Tech. Atlanta, GA, United States) Thom, R. L. (NASA Marshall Space Flight Center Huntsville, AL, United States) Date Acquired
August 12, 2013
Publication Date
December 1, 1985
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 3
ISSN: 0734-2101
Accession Number
86A17480
Funding Number(s)
CONTRACT_GRANT: NAS8-35048
Distribution Limits
Public