Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Quentmeyer, R. J. (NASA Lewis Research Center Cleveland, OH, United States) Mcdonald, G. (NASA Lewis Research Center Cleveland, OH, United States) Hendricks, R. C. (NASA Lewis Research Center Cleveland, OH, United States) Date Acquired
August 12, 2013
Publication Date
December 1, 1985
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 3
ISSN: 0734-2101
Subject Category
Chemistry And Materials (General) Accession Number
86A17483
Distribution Limits
Public