Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Heinemann, K. (Eloret Institute Sunnyvale, CA, United States) Poppa, H. (NASA Ames Research Center; Stanford Joint Institute for Surface and Microstructures Moffett Field, CA, United States) Date Acquired
August 12, 2013
Publication Date
February 1, 1986
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 4
ISSN: 0734-2101
Subject Category
Instrumentation And Photography Accession Number
86A22671
Distribution Limits
Public