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An ultrahigh vacuum multipurpose specimen chamber with sample introduction system for in situ transmission electron microscopy investigationsA commercial transmission electron microscope (TEM), with flat-plate upper pole piece configuration of the objective lens, and top-entry specimen introduction was modified by introducing an ultrahigh vacuum (UHV) specimen chamber for in situ TEM experimentation. The pumping and design principles and special features of this UHV chamber, which makes it possible to obtain 5 x 10 to the -10th mbar pressure at the site of the specimen, while maintaining the airlock system that allows operation in the 10 to the -10th mbar range within 15 min after specimen change, are described. Design operating pressures and image quality (resolution of metal particles smaller than 1 nm in size) were achieved. Schematic drawings and design dimensions are included.
Document ID
19860037933
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Heinemann, K.
(Eloret Institute Sunnyvale, CA, United States)
Poppa, H.
(NASA Ames Research Center; Stanford Joint Institute for Surface and Microstructures Moffett Field, CA, United States)
Date Acquired
August 12, 2013
Publication Date
February 1, 1986
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 4
ISSN: 0734-2101
Subject Category
Instrumentation And Photography
Accession Number
86A22671
Funding Number(s)
CONTRACT_GRANT: NCC2-283
Distribution Limits
Public
Copyright
Other

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