Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Davis, P. R. (Oregon Graduate Center for Study and Research Beaverton, OR, United States) Schwind, G. A. (Oregon Graduate Center for Study and Research Beaverton, OR, United States) Swanson, L. W. (Oregon Graduate Center Beaverton, United States) Date Acquired
August 12, 2013
Publication Date
February 1, 1986
Publication Information
Publication: Journal of Vacuum Science and Technology B
Volume: 4
ISSN: 0734-211X
Report/Patent Number
AFOSR-TR-87-0634AD-A181173 Accession Number
86A28076
Funding Number(s)
CONTRACT_GRANT: NAG3-434
CONTRACT_GRANT: F19628-84-K-0026
CONTRACT_GRANT: AF-AFOSR-83-0105
Distribution Limits
Public