Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Efremow, N. N. (Massachusetts Inst. of Tech. Cambridge, MA, United States) Geis, M. W. (Massachusetts Inst. of Tech. Cambridge, MA, United States) Mountain, R. W. (Massachusetts Inst. of Tech. Cambridge, MA, United States) Lincoln, G. A. (Massachusetts Inst. of Tech. Cambridge, MA, United States) Randall, J. N. (MIT, Lincoln Laboratory, Lexington MA, United States) Date Acquired
August 12, 2013
Publication Date
February 1, 1986
Publication Information
Publication: Journal of Vacuum Science and Technology B
Volume: 4
ISSN: 0734-211X
Accession Number
86A28077
Distribution Limits
Public