Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Nir, D. (NASA Lewis Research Center Cleveland, OH, United States) Mirtich, M. (NASA Lewis Research Center Cleveland, OH, United States) Date Acquired
August 12, 2013
Publication Date
June 1, 1986
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 4
ISSN: 0734-2101
Accession Number
86A47068
Distribution Limits
Public