Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Horton, C. C. (Case Western Reserve Univ. Cleveland, OH, United States) Eck, T. G. (Case Western Reserve Univ. Cleveland, OH, United States) Hoffman, R. W. (Case Western Reserve University Cleveland, OH, United States) Date Acquired
August 12, 2013
Publication Date
June 1, 1986
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 4
ISSN: 0734-2101
Subject Category
Inorganic And Physical Chemistry Accession Number
86A47078
Distribution Limits
Public