Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Dayan, M. (NASA Lewis Research Center Cleveland, OH, United States) Date Acquired
August 12, 2013
Publication Date
February 1, 1986
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 4
ISSN: 0734-2101
Subject Category
Inorganic And Physical Chemistry Accession Number
86A49864
Distribution Limits
Public