NASA Logo, External Link
Facebook icon, External Link to NASA STI page on Facebook Twitter icon, External Link to NASA STI on Twitter YouTube icon, External Link to NASA STI Channel on YouTube RSS icon, External Link to New NASA STI RSS Feed AddThis share icon
 

Record Details

Record 66 of 9434
Amorphous Insulator Films With Controllable Properties
Author and Affiliation:
Alterovitz, Samuel A.(NASA Lewis Research Center, Cleveland, Ohio.)
Warner, Joseph D.(NASA Lewis Research Center, Cleveland, Ohio.)
Liu, David C.(NASA Lewis Research Center, Cleveland, Ohio.)
Pouch, John J.(NASA Lewis Research Center, Cleveland, Ohio.)
Abstract: In experiments described in report, amorphous hydrogenated carbon films grown at room temperature by low-frequency plasma deposition, using methane or butane gas. Films have unique array of useful properties; (a) adhere to wide variety of materials; (b) contain only carbon and hydrogen; (c) smooth and free of pinholes; (d) resistant to attack by moisture and chemicals; and (e) have high electric-breakdown strength and electrical resistivity. Two of optical properties and hardness of this film controlled by deposition conditions. Amorphous a-C:H and BN films used for hermetic sealing and protection of optical, electronic, magnetic, or delicate mechanical systems, and for semiconductor field dielectrics.
Publication Date: Oct 01, 1987
Document ID:
19870000469
(Acquired Nov 04, 1995)
Accession Number: 87B10469
Subject Category: MATERIALS
Report/Patent Number: LEW-14370
Document Type: NASA Tech Brief
Publication Information: NASA Tech Briefs (ISSN 0145-319X); 11; 9; P. 64; (SEE N86-12134/TB)
Publisher Information: United States
Financial Sponsor: NASA; United States
Organization Source: NASA Lewis Research Center; Cleveland, OH, United States
Description: In English
Distribution Limits: Unclassified; Publicly available; Unlimited
Rights: No Copyright
NASA Terms: BORON NITRIDES; ELECTRICAL INSULATION; HYDROCARBONS; THIN FILMS
Availability Source: National Technology Transfer Center (NTTC), Wheeling, WV
Availability Notes: Additional information available through: National Technology Transfer Center (NTTC), Wheeling, WV 26003, (Tel: 1-800-678-6882).
› Back to Top
Find Similar Records
NASA Logo, External Link
NASA Official: Gerald Steeman
Site Curator: STI Program
Last Modified: August 18, 2011
Contact Us