Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Budhani, R. C. (California Univ. Los Angeles, CA, United States) Prakash, S. (California Univ. Los Angeles, CA, United States) Bunshah, R. F. (California, University Los Angeles, United States) Date Acquired
August 13, 2013
Publication Date
December 1, 1986
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 4
ISSN: 0734-2101
Subject Category
Instrumentation And Photography Accession Number
87A26109
Distribution Limits
Public