Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Sliney, Harold E. (NASA Lewis Research Center Cleveland, OH, United States) Date Acquired
August 13, 2013
Publication Date
December 1, 1986
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 4
ISSN: 0734-2101
Accession Number
87A26112
Distribution Limits
Public