Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Garner, Charles (California Institute of Technology Jet Propulsion Laboratory, Pasadena, United States) Date Acquired
August 13, 2013
Publication Date
February 1, 1987
Publication Information
Publication: Journal of Vacuum Science and Technology B
Volume: 5
ISSN: 0734-211X
Accession Number
87A33099
Distribution Limits
Public