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Protective Coating For Laser Drilling Of SiliconSodium silicate prevents spattered silicon from fusing with surrounding material. Sodium silicate solution applied to wafer by dipping and draining or by spinning; application by spraying also works. When dried in oven, solution leaves thin coating of sodium silicate glass.
Document ID
19880000067
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Shlichta, Paul J. (Caltech)
Date Acquired
August 13, 2013
Publication Date
January 1, 1988
Publication Information
Publication: NASA Tech Briefs
Volume: 12
Issue: 1
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
NPO-17148
Accession Number
88B10067
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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