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Forming n/p Junctions With An Excimer LaserCompact equipment yields high-quality solar cells. Computer controls pulses of excimer laser and movement of silcon wafer. Mirrors direct laser beam to wafer. Lenses focus beam to small spot on surface. Process suitable for silicon made by dendritic-web-growth process.
Document ID
19880000446
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Alexander, Paul, Jr.
(Caltech)
Campbell, Robert B.
(Westinghouse Electric Corp.)
Wong, David C.
(Arco Solar)
Bottenberg, William L.
(Arco Solar)
Byron, Stanley
(Spectra-Physics, Inc.)
Date Acquired
August 13, 2013
Publication Date
September 1, 1988
Publication Information
Publication: NASA Tech Briefs
Volume: 12
Issue: 8
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
NPO-16994
Accession Number
88B10446
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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