Optical surface evaluation by soft X-ray scattering

During the fabrication of the mirrors for the Extreme Ultraviolet Explorer (EUVE), methods for evaluating the surface quality of the optics have been developed. Measurement of soft X-ray scattering profiles allows for the determination of the surface roughness and correlation lengths for highly polished metal surfaces. With this method, the surface parameters for one of the Wolter Schwarzschild type I mirrors that had been fabricated for the EUVE mission have been determined. The techniques employed, the theoretical basis for the method, and the data that had been taken are presented. The measurements show that the best mirrors have a surface roughness of 20A rms or less.