Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Berding, M. A. (SRI International Corp. Menlo Park, CA, United States) Sher, A. (SRI International Menlo Park, CA, United States) Chen, A.-B. (Auburn University AL, United States) Date Acquired
August 13, 2013
Publication Date
October 1, 1987
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 5
ISSN: 0734-2101
Accession Number
88A12904
Funding Number(s)
CONTRACT_GRANT: N00014-85-K-0448
CONTRACT_GRANT: NAS1-12232
CONTRACT_GRANT: F49620-85-K-0023
Distribution Limits
Public