Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Shih, C. K. (Stanford Univ. CA, United States) Spicer, W. E. (Stanford University CA, United States) Furdyna, J. K. (Purdue University West Lafayette, IN, United States) Sher, A. (SRI International Menlo Park, CA, United States) Date Acquired
August 13, 2013
Publication Date
October 1, 1987
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 5
ISSN: 0734-2101
Accession Number
88A12906
Funding Number(s)
CONTRACT_GRANT: NAS1-18232
Distribution Limits
Public