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Significance of vapor phase chemical reactions on CVD rates predicted by chemically frozen and local thermochemical equilibrium boundary layer theoriesThis paper investigates the role played by vapor-phase chemical reactions on CVD rates by comparing the results of two extreme theories developed to predict CVD mass transport rates in the absence of interfacial kinetic barrier: one based on chemically frozen boundary layer and the other based on local thermochemical equilibrium. Both theories consider laminar convective-diffusion boundary layers at high Reynolds numbers and include thermal (Soret) diffusion and variable property effects. As an example, Na2SO4 deposition was studied. It was found that gas phase reactions have no important role on Na2SO4 deposition rates and on the predictions of the theories. The implications of the predictions of the two theories to other CVD systems are discussed.
Document ID
19880057197
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Gokoglu, Suleyman A.
(NASA Lewis Research Center Cleveland, OH, United States)
Date Acquired
August 13, 2013
Publication Date
June 1, 1988
Publication Information
Publication: Electrochemical Society, Journal
Volume: 135
ISSN: 0013-4651
Subject Category
Inorganic And Physical Chemistry
Accession Number
88A44424
Distribution Limits
Public
Copyright
Other

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