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A comparison between measured surface microtopography and observed scattering in the extreme ultravioletThe paper presents comparative measurements of surface roughness on prepared samples. These measurements have been made with both Talystep profilometers and WYKO interferometers. In addition, the scattering distribution from these samples was measured at extreme ultraviolet wavelengths. The utility of the WYKO interferometer and Talystep device for specifying extreme ultraviolet mirror surface quality is discussed.
Document ID
19880062603
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Green, James (California Univ. Berkeley, CA, United States)
Jelinsky, Sharon (California Univ. Berkeley, CA, United States)
Bowyer, Stuart (California Univ. Berkeley, CA, United States)
Malina, Roger F. (California, University Berkeley, United States)
Date Acquired
August 13, 2013
Publication Date
January 1, 1988
Subject Category
Optics
Meeting Information
Meeting: Grazing incidence optics for astronomical and laboratory applications
Location: San Diego, CA
Country: United States
Start Date: August 17, 1987
End Date: August 19, 1987
Sponsors: SPIE
Accession Number
88A49830
Funding Number(s)
CONTRACT_GRANT: NAS5-29298
Distribution Limits
Public
Copyright
Other

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