Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Patrick, R. S. (Auburn Univ. AL, United States) Chen, A.-B. (Auburn University AL, United States) Sher, A. (Auburn Univ. AL, United States) Berding, M. A. (SRI International Menlo Park, CA, United States) Date Acquired
August 13, 2013
Publication Date
August 1, 1988
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 6
ISSN: 0734-2101
Accession Number
88A51267
Funding Number(s)
CONTRACT_GRANT: N00014-85-K-0448
CONTRACT_GRANT: F49620-85-C-0023
CONTRACT_GRANT: NAS1-18232
CONTRACT_GRANT: NAG1-708
Distribution Limits
Public