Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Henry, C. R. (IBM Almaden Research Center San Jose, CA, United States) Poppa, H. (Stanford University CA, United States) Date Acquired
August 13, 2013
Publication Date
June 1, 1988
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 6
ISSN: 0734-2101
Accession Number
88A51280
Distribution Limits
Public