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Calculating Obscuration Ratios Of Contaminated SurfacesEquations derived to estimate obscuration ratios of surfaces contaminated by particles. Ratio is fraction of surface area covered by particles. Useful as index of cleanliness in clean-room operations in manufacturing of semiconductor devices, magnetic recording media, optical devices, and pharmaceutical and biotechnological products.
Document ID
19890000419
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Barengoltz, Jack B. (Caltech)
Date Acquired
August 14, 2013
Publication Date
August 1, 1989
Publication Information
Publication: NASA Tech Briefs
Volume: 13
Issue: 8
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
NPO-17376
Accession Number
89B10419
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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