Ion-assisted deposition of lanthanide trifluorides for VUV applicationsThe lanthanide trifluorides show promise as vacuum ultraviolet (VUV) coating materials. The optical properties of single-layer coatings vary with deposition temperature, and with ion-beam energy and current density. The optical constants, stoichiometry, durability, moisture adsorption, and crystallinity are studied for trifluoride films made under a variety of deposition conditions.
Document ID
19890022888
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Lingg, L. J. (Arizona Univ. Tucson, AZ, United States)
Targove, J. D. (Arizona Univ. Tucson, AZ, United States)
Lehan, J. P. (Arizona Univ. Tucson, AZ, United States)
Macleod, H. A. (Arizona, University Tucson, United States)
Date Acquired
August 13, 2013
Publication Date
January 1, 1987
Subject Category
Optics
Meeting Information
Meeting: Current Developments in Optical Engineering II