Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Choi, D. K. (Stanford Univ. CA, United States) Koch, S. M. (Stanford Univ. CA, United States) Takai, T. (Stanford Univ. CA, United States) Halicioglu, T. (Stanford Univ. CA, United States) Tiller, W. A. (Stanford University CA, United States) Date Acquired
August 13, 2013
Publication Date
August 1, 1988
Publication Information
Publication: Journal of Vacuum Science and Technology B
Volume: 6
ISSN: 0734-211X
Accession Number
89A10823
Funding Number(s)
CONTRACT_GRANT: MDA903-85-K-0100
CONTRACT_GRANT: NCC2-297
Distribution Limits
Public