Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Iyer, R. (Colorado State Univ. Fort Collins, CO, United States) Chang, R. R. (Colorado State Univ. Fort Collins, CO, United States) Dubey, A. (Colorado State Univ. Fort Collins, CO, United States) Lile, D. L. (Colorado State University Fort Collins, United States) Date Acquired
August 13, 2013
Publication Date
August 1, 1988
Publication Information
Publication: Journal of Vacuum Science and Technology B
Volume: 6
ISSN: 0734-211X
Accession Number
89A10827
Funding Number(s)
CONTRACT_GRANT: NSF CDR-86-22236
Distribution Limits
Public