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Thin-film hermeticity - A quantitative analysis of diamondlike carbon using variable angle spectroscopic ellipsometryThis paper reports on the successful application of variable-angle spectroscopic ellipsometry to quantitative thin-film hermeticity evaluation. It is shown that, under a variety of film preparations and moisture introduction conditions, water penetrates only a very thin diamondlike carbon (DLC) top surface-roughness region. Thus, DLC is an excellent candidate for use as protective coatings in adverse chemical and aqueous environments.
Document ID
19890026574
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Orzeszko, S.
(Nebraska Univ. Lincoln, NE, United States)
De, Bhola N.
(Nebraska Univ. Lincoln, NE, United States)
Woollam, John A.
(Nebraska, University Lincoln, United States)
Pouch, John J.
(Nebraska Univ. Lincoln, NE, United States)
Alterovitz, Samuel A.
(NASA Lewis Research Center Cleveland, OH, United States)
Date Acquired
August 14, 2013
Publication Date
October 15, 1988
Publication Information
Publication: Journal of Applied Physics
Volume: 64
ISSN: 0021-8979
Subject Category
Solid-State Physics
Accession Number
89A13945
Funding Number(s)
CONTRACT_GRANT: DAAL04-86-C-0030
CONTRACT_GRANT: NAG3-154
Distribution Limits
Public
Copyright
Other

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