Development and applications of optical interferometric micrometrology in the Angstrom and subangstrom rangeThe characteristics of the scanning tunneling microscope and atomic force microscope (AFM) are briefly reviewed, and optical methods, mainly interferometry, of sufficient resolution to measure AFM deflections are discussed. The methods include optical resonators, laser interferometry, multiple-beam interferometry, and evanescent wave detection. Experimental results using AFM are reviewed.
Document ID
19890040292
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Lauer, James L. (Rensselaer Polytechnic Institute, Troy, NY, United States)
Abel, Phillip B. (NASA Lewis Research Center Cleveland, OH, United States)