NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Back to Results
Characterization of Si/CoSi2/Si(111) heterostructures using Auger plasmon lossesThe Si/CoSi2/Si heterostructures prepared by codeposition and solid-phase epitaxy on Si(111) substrates were characterized using Auger plasmon data as a measure of Si overlayer thickness. The method of calibration is described, and the results of two studies, including a study of islanding in Si/CoSi2/Si and a study of diffusion in CoSi2/Si are presented, illustrating the utility of the Auger plasmon loss technique. It is shown that, most likely, the diffusion proceeds through residual defects in the CoSi2.
Document ID
19890050465
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Schowengerdt, F. D.
(Colorado School of Mines Golden, United States)
Lin, T. L.
(Colorado School of Mines Golden, CO, United States)
Fathauer, R. W.
(Colorado School of Mines Golden, CO, United States)
Grunthaner, P. J.
(California Institute of Technology Jet Propulsion Laboratory, Pasadena, United States)
Date Acquired
August 14, 2013
Publication Date
May 1, 1989
Publication Information
Publication: Journal of Applied Physics
Volume: 65
ISSN: 0021-8979
Subject Category
Solid-State Physics
Accession Number
89A37836
Distribution Limits
Public
Copyright
Other

Available Downloads

There are no available downloads for this record.
No Preview Available