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NbN/MgO/NbN edge-geometry tunnel junctionsThe fabrication and low-frequency testing of the first edge-geometry NbN/MgO/NbN superconducting tunnel junctions are reported. The use of an edge geometry allows very small junction areas to be obtained, while the all-NbN electrodes permit operation at 8-10 K with a potential maximum operating frequency above 1 THz. Edge definition in the base NbN film was accomplished utilizing Ar ion milling with an Al2O3 milling mask, followed by a lower energy ion cleaning step. This process has produced all-refractory-material tunnel junctions with areas as small as 0.1 sq micron, resistance-area products less than 21 ohm sq micron, and subgap to normal state resistance ratios larger than 18.
Document ID
19890058077
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
doi:10.1063/1.101760
Authors
Hunt, B. D. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Leduc, H. G. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Cypher, S. R. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Stern, J. A. (California Institute of Technology Jet Propulsion Laboratory, Pasadena, United States)
Judas, A. (MIT Boston, MA, United States)
Date Acquired
August 14, 2013
Publication Date
July 3, 1989
Publication Information
Publication: Applied Physics Letters
Volume: 55
ISSN: 0003-6951
Subject Category
Electronics And Electrical Engineering
Accession Number
89A45448
Distribution Limits
Public
Copyright
Other

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