Surface acoustic-wave piezoelectric crystal aerosol mass microbalance

The development of a particulate mass-sensing instrument based on a quartz-crystal microbalance and enhanced with the new surface acoustic-wave (SAW) technology is reported. Mass sensitivity comparisons of a 158-MHz SAW piezoelectric microbalance and a conventional 10-MHz quartz-crystal microbalance show that the SAW crystal is 266 times more sensitive, in good agreement with the theoretical value of 250. The frequency stability of a single SAW resonator is 6 parts in 10 to the 8th over 1 min. The response to temperature changes is found to be very linear over the range +30 to -30 C. A strong response to 15 ppm SO2 has been demonstrated on a chemically coated SAW crystal.