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Calculating The Resistivity Of A Deposited FilmIterative procedure computes resistivity from measurements by four-probe method. Computer program and technique developed to aid in solution of class of problems in which measurements of electrical resistivity needed for substance deposited on substrate of higher resistivity than deposited layer.
Document ID
19900000533
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Oberle, Lawrence G. (NASA Lewis Research Center, Cleveland, OH.)
Fralick, Gustave C. (NASA Lewis Research Center, Cleveland, OH.)
Date Acquired
August 14, 2013
Publication Date
October 1, 1990
Publication Information
Publication: NASA Tech Briefs
Volume: 14
Issue: 10
ISSN: 0145-319X
Subject Category
Materials
Report/Patent Number
LEW-14389
Accession Number
90B10533
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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