Multiplexed 256 element InGaAs detector arrays for 0.8-1.7-micron room-temperature operation

InGaAs photodetectors have been configured into linear arrays of 30 x 30 micron photodetectors spaced 50 microns apart. The devices have typical responsivities of 0.9 A/W (86-percent QE) at 1.3 microns and exhibit room temperature dark currents below 100 pA. A 256-element array has been mounted in a Reticon multiplexer and configured into a PAR optical multichannel analyzer to extend spectral response out to 1.7 microns. Individual InGaAs detectors have been fabricated for response out to 2.2 microns with dark current below 1 microA (-1V) and 50-percent QE at room temperature.