Small blaze angle gratings with various surface treatments for use in the extreme ultraviolet

Three replica gratings made from a single master, including two epoxy-overcoated gratings with different thicknesses of gold and one grating replicated directly in gold, were studied by measuring and comparing the performances of the gratings in EUV light at grazing incidence angles. The results show that, in situations which require a very low grazing angle, high-quality, mechanically ruled straight groove gratings provide good efficiency and uniform blaze independent of coating thickness up to 1000 A. However, the technique of direct replication in the surface material seems to result in substantially more light scattering and does not seem to have other obvious advantages.